Model improvements to simulate charging in SEM

K. T. Arat; T. Klimpel; C. W. Hagen

doi:10.1117/12.2297478

Model improvements to simulate charging in SEM

K. T. Arat
, T. Klimpel
, C. W. Hagen

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

3 Citations (Scopus)

211 Downloads (Pure)

Abstract

Charging of insulators is a complex phenomenon to simulate since the accuracy of the simulations is very sensitive to the interaction of electrons with matter and electric fields. In this study, we report model improvements for a previously developed Monte-Carlo simulator to more accurately simulate samples that charge. The improvements include both modelling of low energy electron scattering and charging of insulators. The new first-principle scattering models provide a more realistic charge distribution cloud in the material, and a better match between non-charging simulations and experimental results. Improvements on charging models mainly focus on redistribution of the charge carriers in the material with an induced conductivity (EBIC) and a breakdown model, leading to a smoother distribution of the charges. Combined with a more accurate tracing of low energy electrons in the electric field, we managed to reproduce the dynamically changing charging contrast due to an induced positive surface potential.

Original language	English
Title of host publication	Metrology, Inspection, and Process Control for Microlithography XXXII
Editors	V.A. Ukraintsev, O. Adan
Publisher	SPIE
Volume	10585
ISBN (Electronic)	9781510616622
DOIs	https://doi.org/10.1117/12.2297478
Publication status	Published - 1 Jan 2018
Event	Metrology, Inspection, and Process Control for Microlithography XXXII 2018 - San Jose, United States Duration: 26 Feb 2018 → 1 Mar 2018

Conference

Conference	Metrology, Inspection, and Process Control for Microlithography XXXII 2018
Country/Territory	United States
City	San Jose
Period	26/02/18 → 1/03/18

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Breakdown
Charging
EBIC
Low Energy Electrons
Monte-Carlo simulation
SEM

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1058518taverneFinal published version, 2.26 MB

Cite this

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title = "Model improvements to simulate charging in SEM",

abstract = "Charging of insulators is a complex phenomenon to simulate since the accuracy of the simulations is very sensitive to the interaction of electrons with matter and electric fields. In this study, we report model improvements for a previously developed Monte-Carlo simulator to more accurately simulate samples that charge. The improvements include both modelling of low energy electron scattering and charging of insulators. The new first-principle scattering models provide a more realistic charge distribution cloud in the material, and a better match between non-charging simulations and experimental results. Improvements on charging models mainly focus on redistribution of the charge carriers in the material with an induced conductivity (EBIC) and a breakdown model, leading to a smoother distribution of the charges. Combined with a more accurate tracing of low energy electrons in the electric field, we managed to reproduce the dynamically changing charging contrast due to an induced positive surface potential.",

keywords = "Breakdown, Charging, EBIC, Low Energy Electrons, Monte-Carlo simulation, SEM",

author = "Arat, \{K. T.\} and T. Klimpel and Hagen, \{C. W.\}",

note = "Green Open Access added to TU Delft Institutional Repository {\textquoteleft}You share, we take care!{\textquoteright} – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; Metrology, Inspection, and Process Control for Microlithography XXXII 2018 ; Conference date: 26-02-2018 Through 01-03-2018",

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AU - Arat, K. T.

AU - Klimpel, T.

AU - Hagen, C. W.

N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2018/1/1

Y1 - 2018/1/1

N2 - Charging of insulators is a complex phenomenon to simulate since the accuracy of the simulations is very sensitive to the interaction of electrons with matter and electric fields. In this study, we report model improvements for a previously developed Monte-Carlo simulator to more accurately simulate samples that charge. The improvements include both modelling of low energy electron scattering and charging of insulators. The new first-principle scattering models provide a more realistic charge distribution cloud in the material, and a better match between non-charging simulations and experimental results. Improvements on charging models mainly focus on redistribution of the charge carriers in the material with an induced conductivity (EBIC) and a breakdown model, leading to a smoother distribution of the charges. Combined with a more accurate tracing of low energy electrons in the electric field, we managed to reproduce the dynamically changing charging contrast due to an induced positive surface potential.

AB - Charging of insulators is a complex phenomenon to simulate since the accuracy of the simulations is very sensitive to the interaction of electrons with matter and electric fields. In this study, we report model improvements for a previously developed Monte-Carlo simulator to more accurately simulate samples that charge. The improvements include both modelling of low energy electron scattering and charging of insulators. The new first-principle scattering models provide a more realistic charge distribution cloud in the material, and a better match between non-charging simulations and experimental results. Improvements on charging models mainly focus on redistribution of the charge carriers in the material with an induced conductivity (EBIC) and a breakdown model, leading to a smoother distribution of the charges. Combined with a more accurate tracing of low energy electrons in the electric field, we managed to reproduce the dynamically changing charging contrast due to an induced positive surface potential.

KW - Breakdown

KW - Charging

KW - EBIC

KW - Low Energy Electrons

KW - Monte-Carlo simulation

KW - SEM

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U2 - 10.1117/12.2297478

DO - 10.1117/12.2297478

M3 - Conference contribution

VL - 10585

BT - Metrology, Inspection, and Process Control for Microlithography XXXII

A2 - Ukraintsev, V.A.

A2 - Adan, O.

PB - SPIE

T2 - Metrology, Inspection, and Process Control for Microlithography XXXII 2018

Y2 - 26 February 2018 through 1 March 2018

ER -

Model improvements to simulate charging in SEM

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Keywords

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