Modeling of blanket and selective tungsten LPCVD

KJ Kuijlaars, CR Kleijn, HEA van den Akker, TGM Oosterlaken, GCAM Janssen

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationAdvanced metallization and interconnect systems for ULSI applications in 1995
    EditorsRC Ellwanger, SW Wang
    Place of PublicationPittsburgh, Pa (USA)
    PublisherMaterials Research Society
    Number of pages12
    ISBN (Print)1-55899-341-X
    Publication statusPublished - 1996

    Publication series

    PublisherMaterials Research Society

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