Original language | Undefined/Unknown |
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Title of host publication | Advanced metallization and interconnect systems for ULSI applications in 1995 |
Editors | RC Ellwanger, SW Wang |
Place of Publication | Pittsburgh, Pa (USA) |
Publisher | Materials Research Society |
Pages | 353-340 |
Number of pages | 12 |
ISBN (Print) | 1-55899-341-X |
Publication status | Published - 1996 |
Publication series
Name | |
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Publisher | Materials Research Society |