Modeling of blanket and selective tungsten LPCVD

KJ Kuijlaars, CR Kleijn, HEA van den Akker, TGM Oosterlaken, GCAM Janssen

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationAdvanced metallization and interconnect systems for ULSI applications in 1995
    EditorsRC Ellwanger, SW Wang
    Place of PublicationPittsburgh, Pa (USA)
    PublisherMaterials Research Society
    Pages353-340
    Number of pages12
    ISBN (Print)1-55899-341-X
    Publication statusPublished - 1996

    Publication series

    Name
    PublisherMaterials Research Society

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