| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 795-800 |
| Number of pages | 6 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 13 |
| Publication status | Published - 2003 |
Keywords
- ZX CWTS 1.00 <= JFIS < 3.00
| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 795-800 |
| Number of pages | 6 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 13 |
| Publication status | Published - 2003 |