Molecular simulation strategy for mechanical modeling of amorphous/porous low-dielectric constant materials

CA Yuan, O van der Sluis, GQ Zhang, LJ Ernst, WD van Driel, AE Flower, RBR van Silfhout

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)

Abstract

We propose an amorphous/porous molecular connection network generation algorithm for simulating the material stiffness of a low-k material (SiOC:H). Based on a given concentration of the basic building blocks, this algorithm will generate an approximate and large amorphous network. The molecular topology is obtained by distributing these blocks randomly into a predefined framework. Subsequently, a structural relaxation step including local and global perturbations is applied to achieve the most likely stereochemical structure. Thus, the obtained mechanical properties of the low-k materials have been verified with the experimental data.
Original languageUndefined/Unknown
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume92
Publication statusPublished - 2008

Keywords

  • academic journal papers
  • CWTS JFIS >= 2.00

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