Mono crystalline silicon microhotplate heater

M Mihailovic, JF Creemer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProc. eurosensors XXII
EditorsG Gerlach
Place of PublicationDresden, Germany
PublisherVerein Deutscher Ingenieure e.V.
Pages1611-1614
Number of pages4
ISBN (Print)978-3-00-025217-4
Publication statusPublished - 2008
EventEurosensors XXII: The 22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems - Dresden, Germany
Duration: 7 Sep 200810 Sep 2008
Conference number: 22

Publication series

Name
PublisherVerein Deutscher Ingenieure e.V.

Conference

ConferenceEurosensors XXII
CountryGermany
CityDresden
Period7/09/0810/09/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this

Mihailovic, M., Creemer, JF., & Sarro, PM. (2008). Mono crystalline silicon microhotplate heater. In G. Gerlach (Ed.), Proc. eurosensors XXII (pp. 1611-1614). Verein Deutscher Ingenieure e.V..