@inproceedings{3a40680c00554d43b98599c98355a802,
title = "Mono crystalline silicon microhotplate heater",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "M Mihailovic and JF Creemer and PM Sarro",
year = "2008",
language = "Undefined/Unknown",
isbn = "978-3-00-025217-4",
publisher = "Verein Deutscher Ingenieure e.V.",
pages = "1611--1614",
editor = "G Gerlach",
booktitle = "Proc. eurosensors XXII",
note = "Eurosensors XXII ; Conference date: 07-09-2008 Through 10-09-2008",
}