Mono crystalline silicon microhotplate heater

M Mihailovic, JF Creemer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proc. eurosensors XXII
Editors	G Gerlach
Place of Publication	Dresden, Germany
Publisher	Verein Deutscher Ingenieure e.V.
Pages	1611-1614
Number of pages	4
ISBN (Print)	978-3-00-025217-4
Publication status	Published - 2008
Event	Eurosensors XXII: The 22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems - Dresden, Germany Duration: 7 Sept 2008 → 10 Sept 2008 Conference number: 22

Name
Publisher	Verein Deutscher Ingenieure e.V.

Keywords

@inproceedings{3a40680c00554d43b98599c98355a802,

title = "Mono crystalline silicon microhotplate heater",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "M Mihailovic and JF Creemer and PM Sarro",

year = "2008",

language = "Undefined/Unknown",

isbn = "978-3-00-025217-4",

publisher = "Verein Deutscher Ingenieure e.V.",

pages = "1611--1614",

editor = "G Gerlach",

booktitle = "Proc. eurosensors XXII",

note = "Eurosensors XXII ; Conference date: 07-09-2008 Through 10-09-2008",

}

TY - GEN

T1 - Mono crystalline silicon microhotplate heater

AU - Mihailovic, M

AU - Creemer, JF

AU - Sarro, PM

N1 - Conference code: 22

PY - 2008

Y1 - 2008

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-3-00-025217-4

SP - 1611

EP - 1614

BT - Proc. eurosensors XXII

A2 - Gerlach, G

PB - Verein Deutscher Ingenieure e.V.

CY - Dresden, Germany

T2 - Eurosensors XXII

Y2 - 7 September 2008 through 10 September 2008

ER -