Monolithic 3D integration of single-grain Si TFTs

MR Tajari Mofrad, R Ishihara, J Derakhshandeh Kheljani, A Baiano, J van der Cingel, CIM Beenakker

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationAmorphous and polycrystalline thin-film silicon science and technology 2008
EditorsA Nathan, A Flewitt, J Hou, S Miyazaki, J Yang
Place of PublicationWarrendale, PA, USA
PublisherMRS
Pages1-4
Number of pages4
ISBN (Print)978-1-60511-036-3
Publication statusPublished - 2008
EventMRS 2008, Spring Meeting, San Francisco, USA - Warrendale, PA, USA
Duration: 24 Mar 200828 Mar 2008

Publication series

Name
PublisherMRS

Conference

ConferenceMRS 2008, Spring Meeting, San Francisco, USA
Period24/03/0828/03/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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