Monolithic, low-temperature fabrication of three-dimensional integrated circuits

MR Tajari Mofrad

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Beenakker, C.I.M., Supervisor Ishihara, R., Advisor
Award date	17 Oct 2012
Print ISBNs	978-94-6203-173-9
Publication status	Published - 2012

Keywords

@phdthesis{66d62f7dac7b490a82cb552849336069,

title = "Monolithic, low-temperature fabrication of three-dimensional integrated circuits",

keywords = "Diss. prom. aan TU Delft",

author = "{Tajari Mofrad}, MR",

year = "2012",

language = "English",

isbn = "978-94-6203-173-9",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}