Monolithic three-dimensional stacking of integrated circuits with a low-temperature process

MR Tajari Mofrad, J Derakhshandeh Kheljani, R Ishihara, CIM Beenakker

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	The annual workshop on semiconductor advances for future electronics and sensors
Editors	s.n.
Place of Publication	Veldhoven, the Nederlands
Publisher	STW
Pages	596-599
Number of pages	4
Publication status	Published - 2008
Event	SAFE 2008, Veldhoven, the Netherlands - Veldhoven, the Nederlands Duration: 27 Nov 2008 → 28 Nov 2008

Name
Publisher	STW

Conference	SAFE 2008, Veldhoven, the Netherlands
Period	27/11/08 → 28/11/08

Keywords

@inproceedings{5c305ad6695b49ff803d33c6196509b8,

title = "Monolithic three-dimensional stacking of integrated circuits with a low-temperature process",

keywords = "conference contrib. non-refer., Vakpubl., Overig wet. > 3 pag",

author = "{Tajari Mofrad}, MR and {Derakhshandeh Kheljani}, J and R Ishihara and CIM Beenakker",

year = "2008",

language = "Undefined/Unknown",

publisher = "STW",

pages = "596--599",

editor = "s.n.",

booktitle = "The annual workshop on semiconductor advances for future electronics and sensors",

note = "SAFE 2008, Veldhoven, the Netherlands ; Conference date: 27-11-2008 Through 28-11-2008",

}

Monolithic three-dimensional stacking of integrated circuits with a low-temperature process. / Tajari Mofrad, MR; Derakhshandeh Kheljani, J; Ishihara, R et al.
The annual workshop on semiconductor advances for future electronics and sensors. ed. / s.n. Veldhoven, the Nederlands: STW, 2008. p. 596-599.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Monolithic three-dimensional stacking of integrated circuits with a low-temperature process

AU - Tajari Mofrad, MR

AU - Derakhshandeh Kheljani, J

AU - Ishihara, R

AU - Beenakker, CIM

PY - 2008

Y1 - 2008

KW - conference contrib. non-refer.

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SP - 596

EP - 599

BT - The annual workshop on semiconductor advances for future electronics and sensors

A2 - s.n., null

PB - STW

CY - Veldhoven, the Nederlands

T2 - SAFE 2008, Veldhoven, the Netherlands

Y2 - 27 November 2008 through 28 November 2008

ER -