Multi Beam electron source for nanofabrication using electron beam induced deposition

MJ van Bruggen, B van Someren, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    6 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)771-775
    Number of pages5
    JournalMicroelectronic Engineering
    Volume83
    Issue number4-9
    Publication statusPublished - 2006

    Keywords

    • academic journal papers
    • CWTS 0.75 <= JFIS < 2.00

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