Multi Beam electron source for nanofabrication using electron beam induced deposition

MJ van Bruggen, B van Someren, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    6 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)771-775
    Number of pages5
    JournalMicroelectronic Engineering
    Issue number4-9
    Publication statusPublished - 2006


    • academic journal papers
    • CWTS 0.75 <= JFIS < 2.00

    Cite this