Multi Beam electron source for nanofabrication using electron beam induced deposition

MJ van Bruggen, B van Someren, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	771-775
Number of pages	5
Journal	Microelectronic Engineering
Volume	83
Issue number	4-9
Publication status	Published - 2006

Keywords

@article{7b27a1f464ce436383c9566eca2e399f,

title = "Multi Beam electron source for nanofabrication using electron beam induced deposition",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "{van Bruggen}, MJ and {van Someren}, B and P Kruit",

year = "2006",

language = "Undefined/Unknown",

volume = "83",

pages = "771--775",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "4-9",

}

TY - JOUR

T1 - Multi Beam electron source for nanofabrication using electron beam induced deposition

AU - van Bruggen, MJ

AU - van Someren, B

AU - Kruit, P

PY - 2006

Y1 - 2006

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0167-9317

VL - 83

SP - 771

EP - 775

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 4-9

ER -