Multi-Beam Scanning Electron Microscope Design

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	574-575
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	22
Issue number	S3
DOIs	https://doi.org/10.1017/S143192761600372X
Publication status	Published - 2016

Access to Document

@article{8aaaa0fed12447e3bfbf63db45a98403,

title = "Multi-Beam Scanning Electron Microscope Design",

author = "Pieter Kruit and Yan Ren",

year = "2016",

doi = "10.1017/S143192761600372X",

language = "English",

volume = "22",

pages = "574--575",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Cambridge University Press",

number = "S3",

}