Multi-beam scanning electron microscope: experimental results

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	C6G5-C6G10
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	28
Issue number	6
Publication status	Published - 2010

Keywords

@article{bd6678a05bc74eb48e00a55d81c390f6,

title = "Multi-beam scanning electron microscope: experimental results",

keywords = "CWTS JFIS < 0.75",

author = "{Mohammadi Gheidari}, A and CW Hagen and P Kruit",

year = "2010",

language = "English",

volume = "28",

pages = "C6G5--C6G10",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Multi-beam scanning electron microscope: experimental results

AU - Mohammadi Gheidari, A

AU - Hagen, CW

AU - Kruit, P

PY - 2010

Y1 - 2010

KW - CWTS JFIS < 0.75

M3 - Article

SN - 1071-1023

VL - 28

SP - C6G5-C6G10

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -