| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 140-148 |
| Number of pages | 9 |
| Journal | Microelectronic Engineering |
| Volume | 123 |
| Publication status | Published - 2014 |
Multi-electron-beam deflector array
AC Zonnevylle, CTH Heerkens, CW Hagen, P Kruit
Research output: Contribution to journal › Article › Scientific › peer-review
3
Citations
(Scopus)