Research output per year
Research output per year
| Original language | English |
|---|---|
| IPC | H01J |
| Priority date | 4/09/14 |
| Publication status | Published - 2016 |
Bibliographical note
Patent: OCT-14-040Research output
- 1 Patent
-
Multi electron beam inspection apparatus
Kruit, P., 2019, IPC No. H01J, Patent No. CNZL201580057918.2, Priority date 4 Sept 2014Research output: Patent