Multi electron beam inspection apparatus

Pieter Kruit (Inventor)

    Research output: Patent

    Original languageEnglish
    Patent numberCNZL201580057918.2
    IPCH01J
    Priority date4/09/14
    Publication statusPublished - 2019

    Research Output

    Multi electron beam inspection apparatus

    Kruit, P., 2016, IPC No. H01J, Priority date 4 Sep 2014, Priority No. WO2016/036246

    Research output: Patent

    Cite this

    Kruit, P. (2019). IPC No. H01J. Multi electron beam inspection apparatus. (Patent No. CNZL201580057918.2).