Research output per year
Research output per year
| Original language | English |
|---|---|
| Patent number | CNZL201580057918.2 |
| IPC | H01J |
| Priority date | 4/09/14 |
| Publication status | Published - 2019 |
Bibliographical note
Patent: OCT-14-040Research output
- 1 Patent
-
Multi electron beam inspection apparatus
Kruit, P., 2016, IPC No. H01J, Priority date 4 Sept 2014, Priority No. WO2016/036246Research output: Patent