Multi-objective HOO control applied to a wafer stage model

M.J. Zandvliet, CW Scherer, CWJ Hol, MMJ van de Wal

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publication43rd IEEE conference on decision and control
EditorsT Parisini
Place of PublicationPiscataway
PublisherIEEE Society
Pages796-802
Number of pages7
ISBN (Print)0-7803-8682-5
Publication statusPublished - 2004
EventConference, Atlantis - Piscataway
Duration: 14 Dec 200417 Dec 2004

Publication series

Name
PublisherIEEE

Conference

ConferenceConference, Atlantis
Period14/12/0417/12/04

Keywords

  • Conf.proc. > 3 pag

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