@inproceedings{c686ed5230fd437c8aad33bd5abd72a3,
title = "Multi-objective HOO control applied to a wafer stage model",
keywords = "Conf.proc. > 3 pag",
author = "M.J. Zandvliet and CW Scherer and CWJ Hol and {van de Wal}, MMJ",
year = "2004",
language = "Undefined/Unknown",
isbn = "0-7803-8682-5",
publisher = "IEEE Society",
pages = "796--802",
editor = "T Parisini",
booktitle = "43rd IEEE conference on decision and control",
note = "Conference, Atlantis ; Conference date: 14-12-2004 Through 17-12-2004",
}