Multi-Physics Driven Electromigration Study: Multi-Scale Modeling and Experiment

Z. Cui

Research output: ThesisDissertation (TU Delft)

103 Downloads (Pure)


This dissertation presents a comprehensive and integrated study, including theory development, numerical simulation and experiment, for multi-physics driven electromigration in microelectronics. Multi-scale methodologies from atomistic modeling to continuum theory-based simulation have been developed. Moreover, extensive experimental testing, from testing wafer/die design and fabrication, sample preparation and process, to the measurement setup and characterization, has been conducted. The dissertation also provides synergetic and cohesive analysis between simulation and experiment. The simulation predictions and results have been well validated by experimental data.
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
  • Zhang, G.Q., Supervisor
  • Fan, X.J., Supervisor, External person
  • Vollebregt, S., Advisor
Award date20 Dec 2021
Publication statusPublished - 2021


  • Electromigration Simulation
  • Multiphysics
  • Multiscale, Accelerated Measurement
  • Stress-Migration
  • Self-Diffusion
  • Thermomigration
  • Molecular Dynamic Simulation
  • Finite Element Simulation

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