Multi-Scale modeling of chemical vapor deposition processes for thin film technology

CR Kleijn, R Dorsman, KJ Kuijlaars, M Okkerse, H van Santen

    Research output: Contribution to journalArticleScientificpeer-review

    53 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)362-380
    Number of pages19
    JournalJournal of Crystal Growth
    Volume303
    Issue number1
    Publication statusPublished - 2007

    Keywords

    • CWTS 0.75 <= JFIS < 2.00

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