Multibeam electron source for nanofrabrication and multibeam imaging

B van Someren, MJ van Bruggen, P Kruit

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings of the NVvM 2005 meeting, Jaarboek 2005
    Number of pages2
    Publication statusPublished - 2005


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