Multibeam electron source for nanofrabrication and multibeam imaging

B van Someren, MJ van Bruggen, P Kruit

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of the NVvM 2005 meeting, Jaarboek 2005
Pages30-31
Number of pages2
Publication statusPublished - 2005

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van Someren, B., van Bruggen, MJ., & Kruit, P. (2005). Multibeam electron source for nanofrabrication and multibeam imaging. In Proceedings of the NVvM 2005 meeting, Jaarboek 2005 (pp. 30-31)