Multibeam electron source for nanofrabrication and multibeam imaging

B van Someren, MJ van Bruggen, P Kruit

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the NVvM 2005 meeting, Jaarboek 2005
Pages	30-31
Number of pages	2
Publication status	Published - 2005

Keywords

@inproceedings{f0fdb724ad044556921f08e2ffe8b543,

title = "Multibeam electron source for nanofrabrication and multibeam imaging",

keywords = "Geen BTA classificatie",

author = "{van Someren}, B and {van Bruggen}, MJ and P Kruit",

year = "2005",

language = "Undefined/Unknown",

pages = "30--31",

booktitle = "Proceedings of the NVvM 2005 meeting, Jaarboek 2005",

}