| Original language | Undefined/Unknown |
|---|---|
| IPC | Patent Nummer: 00305434.3-2217; Aanvrager: ASML |
| Priority date | 28/06/00 |
| Publication status | Published - 2000 |
Multilayer extreme ultraviolet mirrors with enhanced reflectivity.
M Singh (Inventor)
Research output: Patent
56
Citations
(Scopus)