| Original language | English |
|---|---|
| Patent number | US 8294117 B2 |
| IPC | Applicant: MAPPER LITHOGRAPHY IP BV [NL]; |
| Priority date | 23/10/12 |
| Publication status | Published - 2012 |
Multiple beam charged particle optical system
P Kruit (Inventor), AC Zonnevylle (Inventor)
Research output: Patent