Multiple beam charged particle optical system

P Kruit (Inventor), AC Zonnevylle (Inventor)

    Research output: Patent

    Original languageEnglish
    Patent numberUS 8294117 B2
    IPCApplicant: MAPPER LITHOGRAPHY IP BV [NL];
    Priority date23/10/12
    Publication statusPublished - 2012

    Bibliographical note

    Applicant: MAPPER LITHOGRAPHY IP BV [NL];

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