| Original language | English |
|---|---|
| Patent number | US 8134135 B2 |
| Priority date | 13/03/12 |
| Publication status | Published - 2012 |
Multiple beam charged particle optical system
MJ van Bruggen (Inventor), P Kruit (Inventor)
Research output: Patent
MJ van Bruggen (Inventor), P Kruit (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| Patent number | US 8134135 B2 |
| Priority date | 13/03/12 |
| Publication status | Published - 2012 |