Skip to main navigation Skip to search Skip to main content

Multiple beam charged particle optical system

  • MJ van Bruggen (Inventor)
  • , P Kruit (Inventor)

    Research output: Patent

    Original languageEnglish
    Patent numberWO 2008013442 A1
    IPCApplicant: Mapper Lithography IP BV
    Priority date31/01/08
    Publication statusPublished - 2008

    Bibliographical note

    Applicant: Mapper Lithography IP BV

    Keywords

    • Geen VSNU-classificatie

    Cite this