Multiple beam charged particle optical system

P Kruit (Inventor), AC Zonnevylle (Inventor)

    Research output: Patent

    Original languageEnglish
    Patent numberWO 2010050603 A1
    IPCApplicant: MAPPER LITHOGRAPHY IP BV [NL];
    Priority date24/03/11
    Publication statusPublished - 2011

    Keywords

    • Geen VSNU-classificatie

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