| Original language | English |
|---|---|
| IPC | H01J; G01K; G01N |
| Priority date | 30/06/15 |
| Publication status | Published - 2017 |
Multiple heaters in a MEMS device for drift-free HREM with high temperature changes
Henny Zandbergen (Inventor)
Research output: Patent
Henny Zandbergen (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| IPC | H01J; G01K; G01N |
| Priority date | 30/06/15 |
| Publication status | Published - 2017 |