Multivariable feedback control design for high-precision wafer stage motion

M van de Wal, G van Baars, F Sperling, OH Bosgra

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	739-755
Number of pages	17
Journal	Control Engineering Practice
Volume	10
Publication status	Published - 2002

Keywords

@article{795a363d90de40dcabcd9c8d03ce9168,

title = "Multivariable feedback control design for high-precision wafer stage motion",

keywords = "ZX CWTS JFIS < 1.00",

author = "{van de Wal}, M and {van Baars}, G and F Sperling and OH Bosgra",

year = "2002",

language = "Undefined/Unknown",

volume = "10",

pages = "739--755",

journal = "Control Engineering Practice",

issn = "0967-0661",

publisher = "Elsevier",

}