Multivariable feedback control design for high-precision wafer stage motion

M van de Wal, G van Baars, F Sperling, OH Bosgra

Research output: Contribution to journalArticleScientificpeer-review

119 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)739-755
Number of pages17
JournalControl Engineering Practice
Volume10
Publication statusPublished - 2002

Keywords

  • ZX CWTS JFIS < 1.00

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