Multivariable Feedback Relevant System Identification of a Wafer Stepper System.

RA de Callafon, PMJ van den Hof

    Research output: Contribution to journalArticleScientificpeer-review

    30 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)381-390
    Number of pages10
    JournalIEEE Transactions on Control Systems Technology
    Volume9
    Issue number2
    Publication statusPublished - 2001

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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