Multivariable Feedback Relevant System Identification of a Wafer Stepper System.

RA de Callafon, PMJ van den Hof

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	381-390
Number of pages	10
Journal	IEEE Transactions on Control Systems Technology
Volume	9
Issue number	2
Publication status	Published - 2001

Keywords

@article{784cbe1f0fa349168c7e384f2ae892e9,

title = "Multivariable Feedback Relevant System Identification of a Wafer Stepper System.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{de Callafon}, RA and {van den Hof}, PMJ",

year = "2001",

language = "Undefined/Unknown",

volume = "9",

pages = "381--390",

journal = "IEEE Transactions on Control Systems Technology",

issn = "1063-6536",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

number = "2",

}