Nano-fluidic flow in the nano-aperture ion source

Leon van Kouwen

doi:10.1016/bs.aiep.2019.09.002

Nano-fluidic flow in the nano-aperture ion source

Leon van Kouwen^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

Abstract

An essential aspect of the nano-aperture ion source is the delivery of gas towards the double aperture structure. This requires a nano-fluidic channel. In order to estimate the fluidic properties and understand the underlying transport mechanisms of such a channel, a flow model was developed. The model shows good agreement with three different sets of experimental data. The model is used to show that naive channel design will perform poorly. Nevertheless, carefully designed channels that perform well are achievable.

Original language	English
Pages (from-to)	217-235
Number of pages	19
Journal	Advances in Imaging and Electron Physics
Volume	212
DOIs	https://doi.org/10.1016/bs.aiep.2019.09.002
Publication status	Published - 2019

Keywords

Knudsen minimum
Knudsen paradox
Micro-channels
Micro-fluidics
Molecular flow
Nano-aperture ion source
Nano-fluidic flow
Transition flow

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10.1016/bs.aiep.2019.09.002

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abstract = "An essential aspect of the nano-aperture ion source is the delivery of gas towards the double aperture structure. This requires a nano-fluidic channel. In order to estimate the fluidic properties and understand the underlying transport mechanisms of such a channel, a flow model was developed. The model shows good agreement with three different sets of experimental data. The model is used to show that naive channel design will perform poorly. Nevertheless, carefully designed channels that perform well are achievable.",

keywords = "Knudsen minimum, Knudsen paradox, Micro-channels, Micro-fluidics, Molecular flow, Nano-aperture ion source, Nano-fluidic flow, Transition flow",

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KW - Knudsen paradox

KW - Micro-channels

KW - Micro-fluidics

KW - Molecular flow

KW - Nano-aperture ion source

KW - Nano-fluidic flow

KW - Transition flow

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JF - Advances in Imaging and Electron Physics

ER -

Nano-fluidic flow in the nano-aperture ion source

Abstract

Keywords

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