Nano-fluidic flow in the nano-aperture ion source

Leon van Kouwen

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    An essential aspect of the nano-aperture ion source is the delivery of gas towards the double aperture structure. This requires a nano-fluidic channel. In order to estimate the fluidic properties and understand the underlying transport mechanisms of such a channel, a flow model was developed. The model shows good agreement with three different sets of experimental data. The model is used to show that naive channel design will perform poorly. Nevertheless, carefully designed channels that perform well are achievable.

    Original languageEnglish
    Pages (from-to)217-235
    Number of pages19
    JournalAdvances in Imaging and Electron Physics
    Volume212
    DOIs
    Publication statusPublished - 2019

    Keywords

    • Knudsen minimum
    • Knudsen paradox
    • Micro-channels
    • Micro-fluidics
    • Molecular flow
    • Nano-aperture ion source
    • Nano-fluidic flow
    • Transition flow

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