Nanoelectromechanical sensors based on suspended 2D materials

Max C. Lemme; Stefan Wagner; Kangho Lee; Xuge Fan; Gerard J. Verbiest; Sebastian Wittmann; Sebastian Lukas; Robin J. Dolleman; Frank Niklaus; Herre S.J. van der Zant; Georg S. Duesberg; Peter G. Steeneken

doi:10.34133/2020/8748602

Nanoelectromechanical sensors based on suspended 2D materials

Max C. Lemme^*, Stefan Wagner, Kangho Lee, Xuge Fan, Gerard J. Verbiest, Sebastian Wittmann, Sebastian Lukas, Robin J. Dolleman, Frank Niklaus, Herre S.J. van der Zant, Georg S. Duesberg, Peter G. Steeneken

^*Corresponding author for this work

Research output: Contribution to journal › Review article › peer-review

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Abstract

The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

Original language	English
Article number	8748602
Number of pages	25
Journal	DNA Research
Volume	2020
DOIs	https://doi.org/10.34133/2020/8748602
Publication status	Published - 2020

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title = "Nanoelectromechanical sensors based on suspended 2D materials",

abstract = "The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.",

author = "Lemme, {Max C.} and Stefan Wagner and Kangho Lee and Xuge Fan and Verbiest, {Gerard J.} and Sebastian Wittmann and Sebastian Lukas and Dolleman, {Robin J.} and Frank Niklaus and {van der Zant}, {Herre S.J.} and Duesberg, {Georg S.} and Steeneken, {Peter G.}",

year = "2020",

doi = "10.34133/2020/8748602",

language = "English",

volume = "2020",

journal = "DNA Research",

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AU - Lemme, Max C.

AU - Wagner, Stefan

AU - Lee, Kangho

AU - Fan, Xuge

AU - Verbiest, Gerard J.

AU - Wittmann, Sebastian

AU - Lukas, Sebastian

AU - Dolleman, Robin J.

AU - Niklaus, Frank

AU - van der Zant, Herre S.J.

AU - Duesberg, Georg S.

AU - Steeneken, Peter G.

PY - 2020

Y1 - 2020

N2 - The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

AB - The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

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U2 - 10.34133/2020/8748602

DO - 10.34133/2020/8748602

M3 - Review article

AN - SCOPUS:85093357778

SN - 1340-2838

VL - 2020

JO - DNA Research

JF - DNA Research

M1 - 8748602

ER -

Nanoelectromechanical sensors based on suspended 2D materials

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