Nanofabrication with the helium ion microscope, in 'Metrology, Inspection and process control for microlithography XXIV

D Maas, E van Veldhoven, P Chen, VA Sidorkin, HWM Salemink, EWJM van der Drift, PFA Alkemade

Research output: Contribution to journalConference articleScientificpeer-review

Original languageUndefined/Unknown
Pages (from-to)763814-1-763814-10
JournalProceedings of SPIE- International Society for Optical Engineering
Issue number763814
Publication statusPublished - 2010


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  • Peer-lijst tijdschrift

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