@article{5bd1eba91d5d42ab97324f6de2f214ed,
title = "Nanofabrication with the helium ion microscope, in 'Metrology, Inspection and process control for microlithography XXIV",
keywords = "academic journal papers, Peer-lijst tijdschrift",
author = "D Maas and Veldhoven, {E van} and P Chen and VA Sidorkin and HWM Salemink and {van der Drift}, EWJM and PFA Alkemade",
year = "2010",
language = "Undefined/Unknown",
volume = "7638",
pages = "763814--1--763814--10",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",
number = "763814",
}