Nanometer accurate shaping with Fluid Jet Polishing.

SM Booij, H van Brug, M Singh, JJM Braat

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings SPIE vol. 4506 SPIE's 46th Annual meeting.
Editors	DA Tichenor, JA Folta
Pages	222-232
Number of pages	11
Publication status	Published - 2001

Keywords

@inproceedings{15bb58fc579742b2bdd07253c8f508e3,

title = "Nanometer accurate shaping with Fluid Jet Polishing.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "SM Booij and {van Brug}, H and M Singh and JJM Braat",

year = "2001",

language = "Undefined/Unknown",

pages = "222--232",

editor = "DA Tichenor and JA Folta",

booktitle = "Proceedings SPIE vol. 4506 SPIE's 46th Annual meeting.",

}