Nanometer accurate shaping with Fluid Jet Polishing.

SM Booij, H van Brug, M Singh, JJM Braat

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

22 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings SPIE vol. 4506 SPIE's 46th Annual meeting.
EditorsDA Tichenor, JA Folta
Pages222-232
Number of pages11
Publication statusPublished - 2001

Keywords

  • ZX Int.klas.verslagjaar < 2002

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