@inproceedings{9545db5b511d4fe1ba797723723b7315,
title = "Nanometer precision six degrees of freedom planar motion stage with ferrofluid bearings",
author = "M Cafe and JW Spronck",
note = "NEO; DSPE Conference 2014, Sint Michielsgestel, The Netherlands ; Conference date: 02-09-2014 Through 03-09-2014",
year = "2014",
language = "English",
publisher = "Dutch Society for Precision Engineering",
pages = "47--50",
editor = "A Rankers and A Schrauwen",
booktitle = "Proceedings DSPE Conference on Precision Mechatronics",
}