Nanometer precision six degrees of freedom planar motion stage with ferrofluid bearings

M Cafe, JW Spronck

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageEnglish
Title of host publicationProceedings DSPE Conference on Precision Mechatronics
EditorsA Rankers, A Schrauwen
Place of PublicationEindhoven, The Netherlands
PublisherDutch Society for Precision Engineering
Pages47-50
Number of pages4
Publication statusPublished - 2014
EventDSPE Conference 2014, Sint Michielsgestel, The Netherlands - Eindhoven, The Netherlands
Duration: 2 Sep 20143 Sep 2014

Publication series

Name
PublisherDutch Society for Precision Engineering

Conference

ConferenceDSPE Conference 2014, Sint Michielsgestel, The Netherlands
Period2/09/143/09/14

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