Nanometer-Scale Height Measurements in Micromachined Picoliter Vials based on Interference Fringe Analysis.

LR van den Doel, LJ van Vliet, KT Hjelt, MJ Vellekoop, F Gromball, JG Korvink, IT Young

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

1 Citation (Scopus)
Original languageUndefined/Unknown
Title of host publicationICPR15, Proc. 15th Int. Conference on Pattern Recognition
EditorsA Sanfeliu, JJ Villanueva, M Vanrell, R Alquezar, T Huang, J Serra
Place of PublicationLos Alamitos
PublisherIEEE
Pages57-62
Number of pages6
ISBN (Print)0-7695-0750-6
Publication statusPublished - 2000
EventBarcelona, Spain - Los Alamitos
Duration: 3 Sep 20007 Sep 2000

Publication series

Name
PublisherIEEE Computer Society Press
NameInternational Conference on Pattern Recognition
Volume3
ISSN (Print)1051-4651

Conference

ConferenceBarcelona, Spain
Period3/09/007/09/00

Keywords

  • ZX Int.klas.verslagjaar < 2002

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