Nanopillar Growth by Focused Helium Ion Beam Induced Deposition

P Chen, E van Veldhoven, C.A. Sanford, HWM Salemink, D Maas, D Smith, P.D. Rack, PFA Alkemade

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{f5d5053307374290a24d061b2b4d8af4,

title = "Nanopillar Growth by Focused Helium Ion Beam Induced Deposition",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "P Chen and Veldhoven, {E van} and C.A. Sanford and HWM Salemink and D Maas and D Smith and P.D. Rack and PFA Alkemade",

year = "2010",

language = "Undefined/Unknown",

volume = "21",

pages = "1--7",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing",

number = "455302",

}

TY - JOUR

T1 - Nanopillar Growth by Focused Helium Ion Beam Induced Deposition

AU - Chen, P

AU - Veldhoven, E van

AU - Sanford, C.A.

AU - Salemink, HWM

AU - Maas, D

AU - Smith, D

AU - Rack, P.D.

AU - Alkemade, PFA

PY - 2010

Y1 - 2010

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0957-4484

VL - 21

SP - 1

EP - 7

JO - Nanotechnology

JF - Nanotechnology

IS - 455302

ER -