Nanoscaled niobium trilayer technology, using temperature controlled pattern transfer

T Zijlstra, M Kroug, B Rong, TM Klapwijk

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	369-373
Number of pages	5
Journal	Microelectronic Engineering
Volume	78-79
Publication status	Published - 2005

Keywords

@article{6ac96d0b19004d12bac804e41d8538bf,

title = "Nanoscaled niobium trilayer technology, using temperature controlled pattern transfer",

keywords = "academic journal papers, ZX CWTS JFIS < 1.00",

author = "T Zijlstra and M Kroug and B Rong and TM Klapwijk",

year = "2005",

language = "Undefined/Unknown",

volume = "78-79",

pages = "369--373",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}