Nebula: Monte Carlo simulator of electron–matter interaction

L. van Kessel*, C. W. Hagen

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)
374 Downloads (Pure)

Abstract

Monte Carlo simulations are frequently used to describe electron–matter interaction in the 0–50 keV energy range. It often takes hours to simulate electron microscope images using first-principle physical models. In an attempt to maintain a reasonable speed, empirical models are sometimes used. We present an open-source software package with first-principle physical models, which can run on GPUs for fast results. Typical electron microscope images can be obtained in minutes instead of hours on consumer-grade hardware, without any loss of accuracy.

Original languageEnglish
Article number100605
Number of pages6
JournalSoftwareX
Volume12
DOIs
Publication statusPublished - 2020

Keywords

  • Electron scattering
  • GPU
  • Lithography
  • Metrology
  • Monte Carlo simulation
  • SEM

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