Abstract
Monte Carlo simulations are frequently used to describe electron–matter interaction in the 0–50 keV energy range. It often takes hours to simulate electron microscope images using first-principle physical models. In an attempt to maintain a reasonable speed, empirical models are sometimes used. We present an open-source software package with first-principle physical models, which can run on GPUs for fast results. Typical electron microscope images can be obtained in minutes instead of hours on consumer-grade hardware, without any loss of accuracy.
Original language | English |
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Article number | 100605 |
Number of pages | 6 |
Journal | SoftwareX |
Volume | 12 |
DOIs | |
Publication status | Published - 2020 |
Keywords
- Electron scattering
- GPU
- Lithography
- Metrology
- Monte Carlo simulation
- SEM