Network search method in the design of EUV lithographic objectives

OE Marinescu, F Bociort

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{f96a577a04014857ba74715e6003d6af,

title = "Network search method in the design of EUV lithographic objectives",

keywords = "professional journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "OE Marinescu and F Bociort",

year = "2007",

language = "Undefined/Unknown",

volume = "46",

pages = "8385--8393",

journal = "Applied Optics",

issn = "1559-128X",

publisher = "The Optical Society",

}