Neutron depth profiling on silicon wafers implanted with 1.55 MeV 3He ions through thin aluminium foils

F Labohm, R Delamare, A van Veen

    Research output: Book/ReportReportScientific

    Original languageUndefined/Unknown
    PublisherUnknown Publisher
    Number of pages14
    Publication statusPublished - 2001

    Bibliographical note

    IRI-DM-2001-013

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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