Neutron depth profiling on silicon wafers implanted with 1.55 MeV 3He ions through thin aluminium foils

F Labohm, R Delamare, A van Veen

Research output: Book/Report › Report › Scientific

Keywords

@book{bcbf530fed3548c99947e09c952965f9,

title = "Neutron depth profiling on silicon wafers implanted with 1.55 MeV 3He ions through thin aluminium foils",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "F Labohm and R Delamare and {van Veen}, A",

note = "IRI-DM-2001-013",

year = "2001",

language = "Undefined/Unknown",

publisher = "Unknown Publisher",

}

TY - BOOK

T1 - Neutron depth profiling on silicon wafers implanted with 1.55 MeV 3He ions through thin aluminium foils

AU - Labohm, F

AU - Delamare, R

AU - van Veen, A

N1 - IRI-DM-2001-013

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Report

BT - Neutron depth profiling on silicon wafers implanted with 1.55 MeV 3He ions through thin aluminium foils

PB - Unknown Publisher

ER -