New failure mechanism in silicon nitride resonators

R Kazinczi, JR Mollinger, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

13 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationMEMS 2000: proceedings
Place of PublicationPiscataway
PublisherIEEE Society
Pages229-234
Number of pages6
ISBN (Print)0-7803-5273-4
Publication statusPublished - 2000
Event13th Annual International Conference on Micro Electro Mechanical Systems, Miyazaki - Piscataway
Duration: 23 Jan 200029 Jan 2000

Publication series

Name
PublisherIEEE

Conference

Conference13th Annual International Conference on Micro Electro Mechanical Systems, Miyazaki
Period23/01/0029/01/00

Keywords

  • ZX Int.klas.verslagjaar < 2002

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