New failure mechanism in silicon nitride resonators

R Kazinczi, JR Mollinger, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

14 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	MEMS 2000: proceedings
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	229-234
Number of pages	6
ISBN (Print)	0-7803-5273-4
Publication status	Published - 2000
Event	13th Annual International Conference on Micro Electro Mechanical Systems, Miyazaki - Piscataway Duration: 23 Jan 2000 → 29 Jan 2000

Name
Publisher	IEEE

Conference	13th Annual International Conference on Micro Electro Mechanical Systems, Miyazaki
Period	23/01/00 → 29/01/00

Keywords

@inproceedings{49a72e7441ec4d8297316d48976c6697,

title = "New failure mechanism in silicon nitride resonators",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "R Kazinczi and JR Mollinger and A Bossche",

year = "2000",

language = "Undefined/Unknown",

isbn = "0-7803-5273-4",

publisher = "IEEE Society",

pages = "229--234",

booktitle = "MEMS 2000: proceedings",

note = "null ; Conference date: 23-01-2000 Through 29-01-2000",

}