@inproceedings{49a72e7441ec4d8297316d48976c6697,
title = "New failure mechanism in silicon nitride resonators",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "R Kazinczi and JR Mollinger and A Bossche",
year = "2000",
language = "Undefined/Unknown",
isbn = "0-7803-5273-4",
publisher = "IEEE Society",
pages = "229--234",
booktitle = "MEMS 2000: proceedings",
note = "13th Annual International Conference on Micro Electro Mechanical Systems, Miyazaki ; Conference date: 23-01-2000 Through 29-01-2000",
}