Next-Generation Wafer Stage Motion Control: Connecting System Identification and Robust Control

T Oomen, RAP van Herpen, S Quist, M van de Wal, OH Bosgra, M Steinbuch

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

5 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publication2012 American Control Conference
Editors Tariq Samad
Place of PublicationMontreal, Canada
PublisherACC
Pages2455-2460
Number of pages6
ISBN (Print)978-4577-1094-0
Publication statusPublished - 2012
Event2012 American Control Conference - s.l.
Duration: 27 Jun 201229 Jun 2012

Publication series

Name
PublisherACC

Conference

Conference2012 American Control Conference
Period27/06/1229/06/12

Keywords

  • Conf.proc. > 3 pag

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