@inproceedings{99c4e3e37dab4ad8bacfc1b02d116c08,
title = "Next-Generation Wafer Stage Motion Control: Connecting System Identification and Robust Control",
keywords = "Conf.proc. > 3 pag",
author = "T Oomen and {van Herpen}, RAP and S Quist and {van de Wal}, M and OH Bosgra and M Steinbuch",
year = "2012",
language = "Undefined/Unknown",
isbn = "978-4577-1094-0",
publisher = "ACC",
pages = "2455--2460",
editor = "{Tariq Samad}",
booktitle = "2012 American Control Conference",
note = "2012 American Control Conference ; Conference date: 27-06-2012 Through 29-06-2012",
}