Nitrogen incorporated ultrananocrystalline diamond thermal actuators: design, fabrication and actuation

F Buja; AV Sumant; WM van Spengen

doi:10.1109/Transducers.2013.6627277

Nitrogen incorporated ultrananocrystalline diamond thermal actuators: design, fabrication and actuation

F Buja, AV Sumant, WM van Spengen

Micro and Nano Engineering

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

3 Citations (Scopus)

Original language	English
Title of host publication	Proceedings of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems
Editors	JR Morante, C Hierold
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE Society
Pages	2349-2352
Number of pages	4
ISBN (Print)	978-1-4673-5981-8
DOIs	https://doi.org/10.1109/Transducers.2013.6627277
Publication status	Published - 2013
Event	Transducers 2013 & Eurosensors XXVII, Barcelona, Spain - Piscataway, NJ, USA Duration: 16 Jun 2013 → 20 Jun 2013

Publication series

Name
Publisher	IEEE

Conference

Conference	Transducers 2013 & Eurosensors XXVII, Barcelona, Spain
Period	16/06/13 → 20/06/13

Bibliographical note

harvest

Keywords

Conf.proc. > 3 pag

Access to Document

10.1109/Transducers.2013.6627277

Cite this

Buja, F., Sumant, AV., & van Spengen, WM. (2013). Nitrogen incorporated ultrananocrystalline diamond thermal actuators: design, fabrication and actuation. In JR. Morante, & C. Hierold (Eds.), Proceedings of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2349-2352). IEEE Society. https://doi.org/10.1109/Transducers.2013.6627277

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year = "2013",

doi = "10.1109/Transducers.2013.6627277",

language = "English",

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Buja, F, Sumant, AV & van Spengen, WM 2013, Nitrogen incorporated ultrananocrystalline diamond thermal actuators: design, fabrication and actuation. in JR Morante & C Hierold (eds), Proceedings of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE Society, Piscataway, NJ, USA, pp. 2349-2352, Transducers 2013 & Eurosensors XXVII, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6627277

Nitrogen incorporated ultrananocrystalline diamond thermal actuators: design, fabrication and actuation. / Buja, F; Sumant, AV; van Spengen, WM.
Proceedings of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems. ed. / JR Morante; C Hierold. Piscataway, NJ, USA: IEEE Society, 2013. p. 2349-2352.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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AU - van Spengen, WM

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