Nitrogen incorporated ultrananocrystalline diamond thermal actuators: design, fabrication and actuation

F Buja, AV Sumant, WM van Spengen

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems
EditorsJR Morante, C Hierold
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages2349-2352
Number of pages4
ISBN (Print)978-1-4673-5981-8
DOIs
Publication statusPublished - 2013
EventTransducers 2013 & Eurosensors XXVII, Barcelona, Spain - Piscataway, NJ, USA
Duration: 16 Jun 201320 Jun 2013

Publication series

Name
PublisherIEEE

Conference

ConferenceTransducers 2013 & Eurosensors XXVII, Barcelona, Spain
Period16/06/1320/06/13

Keywords

  • Conf.proc. > 3 pag

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