Nominal and robust feedforward design with time domain constraints applied to a wafer stage

E. de Gelder, M van de Wal, CW Scherer, CWJ Hol, OH Bosgra

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)204-215
Number of pages12
JournalJournal of Dynamic Systems, Measurement and Control
Volume128
Issue number2
Publication statusPublished - 2006

Keywords

  • CWTS JFIS < 0.75

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