Abstract
This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup, including a laser and photodiode. The results are a resonance frequency of 12.6 Hz, which can be further tuned depending on the application by varying the mass, beam thickness and tilt of the structure. This results in a mechanical sensitivity of 0.16 [mm/ms-2]. The future goal of this work is to integrate a read-out scheme on wafer level, for example electrostatically.
Original language | English |
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Title of host publication | 2018 IEEE SENSORS Proceedings |
Editors | A. Roy, Y. Gianchandani |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Pages | 1-4 |
Number of pages | 4 |
Volume | 2018-October |
ISBN (Electronic) | 978-153864707-3 |
ISBN (Print) | 978-1-5386-4708-0 |
DOIs | |
Publication status | Published - 2018 |
Event | IEEE Sensors 2018: 17th IEEE Sensors Conference - Pullman Aerocity, New Delhi, India Duration: 28 Oct 2018 → 31 Oct 2018 Conference number: 17 |
Conference
Conference | IEEE Sensors 2018 |
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Country/Territory | India |
City | New Delhi |
Period | 28/10/18 → 31/10/18 |
Bibliographical note
Accepted author manuscriptKeywords
- accelerometer
- large displacement behaviour
- non-linear MEMS
- optical readout