Non-linear bulk micromachined accelerometer for high sensitivity applications

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This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup, including a laser and photodiode. The results are a resonance frequency of 12.6 Hz, which can be further tuned depending on the application by varying the mass, beam thickness and tilt of the structure. This results in a mechanical sensitivity of 0.16 [mm/ms-2]. The future goal of this work is to integrate a read-out scheme on wafer level, for example electrostatically.

Original languageEnglish
Title of host publication2018 IEEE SENSORS Proceedings
EditorsA. Roy, Y. Gianchandani
Place of PublicationPiscataway, NJ
Number of pages4
ISBN (Electronic)978-153864707-3
ISBN (Print)978-1-5386-4708-0
Publication statusPublished - 2018
EventIEEE Sensors 2018: 17th IEEE Sensors Conference - Pullman Aerocity, New Delhi, India
Duration: 28 Oct 201831 Oct 2018
Conference number: 17


ConferenceIEEE Sensors 2018
CityNew Delhi

Bibliographical note

Accepted author manuscript


  • accelerometer
  • large displacement behaviour
  • non-linear MEMS
  • optical readout


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