Non-linear bulk micromachined accelerometer for high sensitivity applications

L.M. Middelburg; B. El Mansouri; Rene Poelma; G.Q. Zhang; Henk van Zeijl; Jia Wei

doi:10.1109/ICSENS.2018.8589630

Non-linear bulk micromachined accelerometer for high sensitivity applications

L.M. Middelburg
, B. El Mansouri
, Rene Poelma
, G.Q. Zhang
, Henk van Zeijl
, Jia Wei

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup, including a laser and photodiode. The results are a resonance frequency of 12.6 Hz, which can be further tuned depending on the application by varying the mass, beam thickness and tilt of the structure. This results in a mechanical sensitivity of 0.16 [mm/ms-2]. The future goal of this work is to integrate a read-out scheme on wafer level, for example electrostatically.

Original language	English
Title of host publication	2018 IEEE SENSORS Proceedings
Editors	A. Roy, Y. Gianchandani
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	1-4
Number of pages	4
Volume	2018-October
ISBN (Electronic)	978-153864707-3
ISBN (Print)	978-1-5386-4708-0
DOIs	https://doi.org/10.1109/ICSENS.2018.8589630
Publication status	Published - 2018
Event	IEEE Sensors 2018: 17th IEEE Sensors Conference - Pullman Aerocity, New Delhi, India Duration: 28 Oct 2018 → 31 Oct 2018 Conference number: 17

Conference

Conference	IEEE Sensors 2018
Country/Territory	India
City	New Delhi
Period	28/10/18 → 31/10/18

Bibliographical note

Accepted author manuscript

Keywords

accelerometer
large displacement behaviour
non-linear MEMS
optical readout

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10.1109/ICSENS.2018.8589630

51655507 - PID5537449 (1)Accepted author manuscript, 568 KB

Cite this

@inproceedings{cb60696d11f44e07adc42aca485f3b87,

title = "Non-linear bulk micromachined accelerometer for high sensitivity applications",

abstract = "This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup, including a laser and photodiode. The results are a resonance frequency of 12.6 Hz, which can be further tuned depending on the application by varying the mass, beam thickness and tilt of the structure. This results in a mechanical sensitivity of 0.16 [mm/ms-2]. The future goal of this work is to integrate a read-out scheme on wafer level, for example electrostatically.",

keywords = "accelerometer, large displacement behaviour, non-linear MEMS, optical readout",

author = "L.M. Middelburg and Mansouri, \{B. El\} and Rene Poelma and G.Q. Zhang and \{van Zeijl\}, Henk and Jia Wei",

note = "Accepted author manuscript; IEEE Sensors 2018 : 17th IEEE Sensors Conference ; Conference date: 28-10-2018 Through 31-10-2018",

year = "2018",

doi = "10.1109/ICSENS.2018.8589630",

language = "English",

isbn = "978-1-5386-4708-0",

volume = "2018-October",

pages = "1--4",

editor = "A. Roy and Y. Gianchandani",

booktitle = "2018 IEEE SENSORS Proceedings",

publisher = "IEEE",

address = "United States",

}

Middelburg, LM, Mansouri, BE, Poelma, R , Zhang, GQ , van Zeijl, H & Wei, J 2018, Non-linear bulk micromachined accelerometer for high sensitivity applications. in A Roy & Y Gianchandani (eds), 2018 IEEE SENSORS Proceedings. vol. 2018-October, 8589630, IEEE, Piscataway, NJ, pp. 1-4, IEEE Sensors 2018, New Delhi, India, 28/10/18. https://doi.org/10.1109/ICSENS.2018.8589630

Non-linear bulk micromachined accelerometer for high sensitivity applications. / Middelburg, L.M.; Mansouri, B. El; Poelma, Rene et al.
2018 IEEE SENSORS Proceedings. ed. / A. Roy; Y. Gianchandani. Vol. 2018-October Piscataway, NJ: IEEE, 2018. p. 1-4 8589630.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Non-linear bulk micromachined accelerometer for high sensitivity applications

AU - Middelburg, L.M.

AU - Mansouri, B. El

AU - Poelma, Rene

AU - Zhang, G.Q.

AU - van Zeijl, Henk

AU - Wei, Jia

N1 - Conference code: 17

PY - 2018

Y1 - 2018

N2 - This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup, including a laser and photodiode. The results are a resonance frequency of 12.6 Hz, which can be further tuned depending on the application by varying the mass, beam thickness and tilt of the structure. This results in a mechanical sensitivity of 0.16 [mm/ms-2]. The future goal of this work is to integrate a read-out scheme on wafer level, for example electrostatically.

AB - This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup, including a laser and photodiode. The results are a resonance frequency of 12.6 Hz, which can be further tuned depending on the application by varying the mass, beam thickness and tilt of the structure. This results in a mechanical sensitivity of 0.16 [mm/ms-2]. The future goal of this work is to integrate a read-out scheme on wafer level, for example electrostatically.

KW - accelerometer

KW - large displacement behaviour

KW - non-linear MEMS

KW - optical readout

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DO - 10.1109/ICSENS.2018.8589630

M3 - Conference contribution

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SN - 978-1-5386-4708-0

VL - 2018-October

SP - 1

EP - 4

BT - 2018 IEEE SENSORS Proceedings

A2 - Roy, A.

A2 - Gianchandani, Y.

PB - IEEE

CY - Piscataway, NJ

T2 - IEEE Sensors 2018

Y2 - 28 October 2018 through 31 October 2018

ER -

Non-linear bulk micromachined accelerometer for high sensitivity applications

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Keywords

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