Novel atomic force microscopy probes with phononic crystals

R.A. Norte (Inventor), Milan P. Allan (Inventor), S. Groeblacher (Inventor), M. Leeuwenhoek (Inventor)

Research output: Patent

Original languageEnglish
IPCG10K, G01Q, H03H
Priority date18/12/19
Publication statusPublished - 2021

Bibliographical note

Patent:OCT-19-056
Applicant: TU Delft

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