Novel electrothermal bimorph actuator for large out-of-plane displacement and force

J Wei, T Chu Duc, GK Lau, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

9 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProc. IEEE MEMS 2008 Conference
EditorsO Brand, Y Zohar
Place of Publications.l.
PublisherIEEE Society
Pages46-49
Number of pages4
ISBN (Print)987-1-4244-1792-6
Publication statusPublished - 2008
EventIEEE MEMS 2008, Tucson, Arizona, USA - s.l.
Duration: 13 Jan 200817 Jan 2008

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE MEMS 2008, Tucson, Arizona, USA
Period13/01/0817/01/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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