Novel method for spinning of photoresist on wafers with through-holes

VG Kiutchoukov, JR Mollinger, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Eurosensors XIII: proceedings [CD-ROM]
Editors	M Bartek
Place of Publication	Delft
Publisher	Delft University of Technology
Pages	277-280
Number of pages	4
ISBN (Print)	90-76699-02-X
Publication status	Published - 1999
Event	13th European Conference on Solid-State Transducers, The Hague - Delft Duration: 12 Sep 1999 → 15 Sep 1999

Name
Publisher	Delft University of Technology

Conference	13th European Conference on Solid-State Transducers, The Hague
Period	12/09/99 → 15/09/99

Keywords

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title = "Novel method for spinning of photoresist on wafers with through-holes",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "VG Kiutchoukov and JR Mollinger and A Bossche",

year = "1999",

language = "Undefined/Unknown",

isbn = "90-76699-02-X",

publisher = "Delft University of Technology",

pages = "277--280",

editor = "{M Bartek}",

booktitle = "Eurosensors XIII: proceedings [CD-ROM]",

address = "Netherlands",

note = "null ; Conference date: 12-09-1999 Through 15-09-1999",

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TY - GEN

T1 - Novel method for spinning of photoresist on wafers with through-holes

AU - Kiutchoukov, VG

AU - Mollinger, JR

AU - Bossche, A

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-76699-02-X

SP - 277

EP - 280

BT - Eurosensors XIII: proceedings [CD-ROM]

A2 - M Bartek, null

PB - Delft University of Technology

CY - Delft

Y2 - 12 September 1999 through 15 September 1999

ER -