Novel method for spinning of photoresist on wafers with through-holes

VG Kiutchoukov, A Bossche, JR Mollinger

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Eurosensors XIII: book of abstracts
Editors	M Bartek
Place of Publication	Delft
Publisher	Delft University of Technology
Pages	137-138
Number of pages	2
ISBN (Print)	90-76699-01-1
Publication status	Published - 1999
Event	13th European Conference on Solid-State Transducers, The Hague - Delft Duration: 12 Sep 1999 → 15 Sep 1999

Name
Publisher	Delft University of Technology

Conference	13th European Conference on Solid-State Transducers, The Hague
Period	12/09/99 → 15/09/99

Keywords

@inproceedings{140b7c48bf384906a6a8f9c691933960,

title = "Novel method for spinning of photoresist on wafers with through-holes",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "VG Kiutchoukov and A Bossche and JR Mollinger",

year = "1999",

language = "Undefined/Unknown",

isbn = "90-76699-01-1",

publisher = "Delft University of Technology",

pages = "137--138",

editor = "{M Bartek}",

booktitle = "Eurosensors XIII: book of abstracts",

address = "Netherlands",

note = "null ; Conference date: 12-09-1999 Through 15-09-1999",

}

TY - GEN

T1 - Novel method for spinning of photoresist on wafers with through-holes

AU - Kiutchoukov, VG

AU - Bossche, A

AU - Mollinger, JR

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-76699-01-1

SP - 137

EP - 138

BT - Eurosensors XIII: book of abstracts

A2 - M Bartek, null

PB - Delft University of Technology

CY - Delft

Y2 - 12 September 1999 through 15 September 1999

ER -