@inproceedings{140b7c48bf384906a6a8f9c691933960,
title = "Novel method for spinning of photoresist on wafers with through-holes",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "VG Kiutchoukov and A Bossche and JR Mollinger",
year = "1999",
language = "Undefined/Unknown",
isbn = "90-76699-01-1",
publisher = "Delft University of Technology",
pages = "137--138",
editor = "{M Bartek}",
booktitle = "Eurosensors XIII: book of abstracts",
address = "Netherlands",
note = "null ; Conference date: 12-09-1999 Through 15-09-1999",
}