Novel nanosample preparation with a helium ion microscope

M Rudneva, E van Veldhoven, SRK Malladi, D.J. Maas, HW Zandbergen

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    Abstract

    In this article, we present novel sample preparation methods using a helium ion microscope (HIM). We report the possibility of reshaping, at room temperature, thin metal lines on an electron-transparent membrane: A set of platinum bridges with standard geometry (300 x 200 x 15 nm) was modified at room temperature into different shapes using focused helium (He)-ion beam. Also the applicability of the HIM as a tool for precise modification of silicon (Si) and strontium titanate (SrTiO3) lamellae is shown and discussed. We demonstrated that in situ heating (e. g., at 600 degrees C) of the samples during He-beam illumination by use of a specially developed heating stage enables production of thin Si and SrTiO3 samples without significant artifacts. The quality of such cuts was inspected by transmission electron microscopy with high-resolution imaging, and the diffraction patterns were analyzed.
    Original languageUndefined/Unknown
    Pages (from-to)1013-1020
    Number of pages8
    JournalJournal of Materials Research
    Volume28
    Issue number8
    Publication statusPublished - 2013

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